Title:
EFEM SYSTEM AND GAS SUPPLY METHOD IN EFEM SYSTEM
Document Type and Number:
Japanese Patent JP2019161097
Kind Code:
A
Abstract:
To reduce a supply amount of an inactive gas required for declining a humidity in an inner space to which an atmospheric air had been discharged when atmosphere in the inner space of an EFEM is replaced in the inactive gas.SOLUTION: An EFEM system provides: an inactive gas supply path 61 capable of supplying a nitrogen to an inner space 40 of an EFEM 1; a first switch part 63 switching a state of supplying the inactive gas into the inner space 40 from the inactive gas supply path 61 and a state of not supplying it; a dry air supply path 71 capable of supplying a dry air into the inner space 40; a second switch part 73 switching the state of supplying the dry air into the inner space 40 from the dry air supply path 71 and the state of not supplying it.SELECTED DRAWING: Figure 3
Inventors:
KAWAI TOSHIHIRO
OGURA GENGORO
OGURA GENGORO
Application Number:
JP2018048072A
Publication Date:
September 19, 2019
Filing Date:
March 15, 2018
Export Citation:
Assignee:
SINFONIA TECHNOLOGY CO LTD
International Classes:
H01L21/677
Domestic Patent References:
| JP2016527732A | 2016-09-08 | |||
| JP2005101185A | 2005-04-14 | |||
| JP2002056643A | 2002-02-22 | |||
| JP2002359180A | 2002-12-13 | |||
| JP2005142185A | 2005-06-02 | |||
| JP2010072624A | 2010-04-02 | |||
| JP2000353738A | 2000-12-19 | |||
| JP2015146349A | 2015-08-13 | |||
| JPH113867A | 1999-01-06 | |||
| JP2016015435A | 2016-01-28 |
Other References:
楠木喜博: "窒素ガス発生装置", 膜(MEMBRANE), vol. 19, no. 4, JPN6022001619, 1994, JP, pages 277 - 279, ISSN: 0004683959
Attorney, Agent or Firm:
Kaji/Suhara Patent Office