Title:
PLASMA PROCESSING APPARATUS AND METHOD FOR OPERATING PLASMA PROCESSING APPARATUS
Document Type and Number:
Japanese Patent JP2020065081
Kind Code:
A
Abstract:
To provide a plasma processing apparatus having improved yield.SOLUTION: A plasma processing apparatus includes one window which is arranged on a side wall on one side of a vacuum container surrounding a processing chamber, and through which light from plasma in the processing chamber is transmitted, the other window arranged on the other side with respect to the one window with the processing chamber interposed therebetween, a light absorbing unit that is outside the one window and absorbs light transmitted through the one window, and a light branching unit that is arranged between the other window and a light source disposed outside the other window, branches light from the light source to an optical path directing to the inside of the processing chamber and an optical path directing to yet another direction, and further branches light inside the processing chamber from the other window to another direction, and further includes a detector that is configured so that each of the light directing from the light branching unit to the processing chamber, the light branched to the other direction in the light branching unit, and the light directing to the yet another direction in the light branching unit can be selectively transmitted to a light receiving unit, and detects the amounts of these light received by the light receiving unit, and a controller for adjusting a condition for processing a wafer based on a detection result of the detector.SELECTED DRAWING: Figure 1
Inventors:
OMORI TAKESHI
SATO DAISUKE
USUI TAKETO
INOUE TOMOMI
MAEDA KENJI
SATO DAISUKE
USUI TAKETO
INOUE TOMOMI
MAEDA KENJI
Application Number:
JP2020005557A
Publication Date:
April 23, 2020
Filing Date:
January 17, 2020
Export Citation:
Assignee:
HITACHI HIGH-TECH CORP
International Classes:
H01L21/3065; H05H1/00; H05H1/46
Domestic Patent References:
| JPH10102251A | 1998-04-21 | |||
| JPS63293827A | 1988-11-30 | |||
| JPH05259250A | 1993-10-08 | |||
| JPH08106992A | 1996-04-23 | |||
| JP2003264175A | 2003-09-19 | |||
| JP2000031124A | 2000-01-28 | |||
| JP2001152341A | 2001-06-05 |
Foreign References:
| KR100812744B1 | 2008-03-12 |
Attorney, Agent or Firm:
Yuji Toda