Title:
PROCESSING DEVICE
Document Type and Number:
Japanese Patent JP2021122932
Kind Code:
A
Abstract:
To eliminate a need of a protection cover, such as a bellows cover, and improve a recovery rate of processed wastes.SOLUTION: A processing device includes: work tables 2A, 2B which are fixed in at least X and Y directions on a horizontal surface and respectively hold work objects W; a processing mechanism 3 which processes the work objects W with rotary tools 30 while using a working fluid; a moving mechanism 5 which linearly moves the processing mechanism 3 in at least the X and Y directions on the horizontal surface; and a processed waste storage part 9 which is provided below the work tables 2A, 2B and stores process wastes S occurring due to processing by the processing mechanism 3.SELECTED DRAWING: Figure 2
Inventors:
FUKAI MOTOKI
HORI SATOKO
SHIRAI KATSUMASA
AZUMA HIDEKAZU
HORI SATOKO
SHIRAI KATSUMASA
AZUMA HIDEKAZU
Application Number:
JP2020020575A
Publication Date:
August 30, 2021
Filing Date:
February 10, 2020
Export Citation:
Assignee:
TOWA CORP
International Classes:
B23Q11/00; B23Q1/48; B23Q3/08; B24B27/06; B24B41/06; B24B55/06; B24B55/12; H01L21/301
Domestic Patent References:
| JP2007160444A | 2007-06-28 | |||
| JP2019058995A | 2019-04-18 | |||
| JP2016134475A | 2016-07-25 | |||
| JPH0231646U | 1990-02-28 | |||
| JP2002144176A | 2002-05-21 | |||
| JP2007038398A | 2007-02-15 | |||
| JP2006255859A | 2006-09-28 |
Foreign References:
| CN103358186A | 2013-10-23 | |||
| WO2009001889A1 | 2008-12-31 | |||
| WO2014061210A1 | 2014-04-24 |
Attorney, Agent or Firm:
Ryuhei Nishimura
Saito Shindai
Uemura Yoshinaga
Atsushi Nakamura
Maeda Haruko
Saito Shindai
Uemura Yoshinaga
Atsushi Nakamura
Maeda Haruko