Title:
【発明の名称】処理装置
Document Type and Number:
Japanese Patent JP2509817
Kind Code:
B2
Inventors:
NOZAWA TOSHIHISA
Application Number:
JP27884387A
Publication Date:
June 26, 1996
Filing Date:
November 04, 1987
Export Citation:
Assignee:
TOKYO ELECTRON LTD
International Classes:
H01L21/205; H01L21/26; H01L21/31; (IPC1-7): H01L21/205; H01L21/26; H01L21/31
Domestic Patent References:
| JP6101445B2 |
Attorney, Agent or Firm:
Miaki Kametani (2 outside)