Title:
【考案の名称】レールおよびルーフより成る被測定半導体搬送装置
Document Type and Number:
Japanese Patent JP2556947
Kind Code:
Y2
Inventors:
Kikuchi Koji
Application Number:
JP5151792U
Publication Date:
December 08, 1997
Filing Date:
July 22, 1992
Export Citation:
Assignee:
Advantest Corporation
International Classes:
B65G11/16; B65G47/78; G01R31/26; H05K13/02; (IPC1-7): B65G11/16; H05K13/02
Domestic Patent References:
| JP61169416A |
Attorney, Agent or Firm:
Kusano Taku (1 person outside)
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