Title:
【発明の名称】分子線エピタキシー装置の水銀カドミウムテルル薄膜用基板ホルダー
Document Type and Number:
Japanese Patent JP2850642
Kind Code:
B2
Inventors:
SASAKI NARIHITO
Application Number:
JP14517992A
Publication Date:
January 27, 1999
Filing Date:
June 05, 1992
Export Citation:
Assignee:
NIPPON DENKI KK
International Classes:
C30B23/08; C30B29/48; H01L21/203; (IPC1-7): C30B29/48
Domestic Patent References:
| JP426586A |
Attorney, Agent or Firm:
Naoki Kyomoto (2 outside)