Title:
【発明の名称】セルフテスト機能付加速度センサ
Document Type and Number:
Japanese Patent JP2951067
Kind Code:
B2
Inventors:
TAKAMI KAZUAKI
Application Number:
JP26384691A
Publication Date:
September 20, 1999
Filing Date:
October 11, 1991
Export Citation:
Assignee:
SANYO DENKI KK
International Classes:
G01P15/12; H01L21/66; H01L23/02; H01L29/84; (IPC1-7): H01L21/66; G01P15/12; H01L23/02; H01L29/84
Domestic Patent References:
| JP3210479A |
Attorney, Agent or Firm:
Koji Yasutomi (1 person outside)