Title:
【発明の名称】形状測定方法及びそれを用いた形状測定装置
Document Type and Number:
Japanese Patent JP2996165
Kind Code:
B2
Inventors:
Negishi Masato
Application Number:
JP1717996A
Publication Date:
December 27, 1999
Filing Date:
January 05, 1996
Export Citation:
Assignee:
Canon Inc
International Classes:
G01B21/20; G01M11/00; (IPC1-7): G01B21/20
Domestic Patent References:
| JP510751A | ||||
| JP6186025A | ||||
| JP7294242A | ||||
| JP4276513A | ||||
| JP1171309U |
Attorney, Agent or Firm:
Takanashi Yukio