Title:
表面平坦化方法および表面平坦化装置
Document Type and Number:
Japanese Patent JP3601937
Kind Code:
B2
Inventors:
Yasui feeling
Shigeo Moriyama
▲片▼桐 創一
Katsuhiko Yamaguchi
Shigeo Moriyama
▲片▼桐 創一
Katsuhiko Yamaguchi
Application Number:
JP13642997A
Publication Date:
December 15, 2004
Filing Date:
May 27, 1997
Export Citation:
Assignee:
Renesas Technology Corp.
International Classes:
H01L21/3205; H01L21/304; (IPC1-7): H01L21/304; H01L21/3205
Domestic Patent References:
| JP63097457U | ||||
| JP7027754U | ||||
| JP5060769U | ||||
| JP9109005A | ||||
| JP60078254U | ||||
| JP8132342A | ||||
| JP9050974A | ||||
| JP61226272A | ||||
| JP8229808A |
Foreign References:
| WO1997010613A1 |
Attorney, Agent or Firm:
Katsuo Ogawa