Title:
窒化チタン薄膜成膜方法
Document Type and Number:
Japanese Patent JP3615801
Kind Code:
B2
Inventors:
Koji Nagatani
Seiichi Takahashi
Yuzo Kashimoto
Kondo Chiho
Mizusawa Ning
Seiichi Takahashi
Yuzo Kashimoto
Kondo Chiho
Mizusawa Ning
Application Number:
JP26887394A
Publication Date:
February 02, 2005
Filing Date:
November 01, 1994
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
C23C14/06; C23C14/34; C23C14/54; (IPC1-7): C23C14/54; C23C14/06; C23C14/34
Domestic Patent References:
| JP53033759B1 | ||||
| JP6158299A |
Attorney, Agent or Firm:
Kinichi Kitamura
Tashiro Sakuo
Etsuo Machida
Tashiro Sakuo
Etsuo Machida