Title:
欠陥検査装置およびそれを用いたデバイス製造方法
Document Type and Number:
Japanese Patent JP3981245
Kind Code:
B2
Inventors:
Ichiro Nagahama
Atsushi Onishi
Yuichiro Yamazaki
Kenji Watanabe
Toru Satake
Toshifumi Kinma
Masanori Hatakeyama
Tsutomu Karimata
Atsushi Onishi
Yuichiro Yamazaki
Kenji Watanabe
Toru Satake
Toshifumi Kinma
Masanori Hatakeyama
Tsutomu Karimata
Application Number:
JP2001125755A
Publication Date:
September 26, 2007
Filing Date:
April 24, 2001
Export Citation:
Assignee:
Toshiba Corporation
Ebara Corporation
Ebara Corporation
International Classes:
G01B15/00; H01L21/66; G01N23/22
Domestic Patent References:
| JP11108864A | ||||
| JP2001074437A | ||||
| JP2001093950A | ||||
| JP54027371A | ||||
| JP6294848A | ||||
| JP7153410A | ||||
| JP2000286310A | ||||
| JP2000338070A |
Attorney, Agent or Firm:
Kazuo Shamoto
Akio Chiba
Shigeru Ito
Fujihiro Kanda
Hiroyuki Uchida
Toru Miyamae
Akio Chiba
Shigeru Ito
Fujihiro Kanda
Hiroyuki Uchida
Toru Miyamae