Title:
クリーニングシ―ト、クリーニング機能付き搬送部材、及びこれらを用いた基板処理装置のクリーニング方法
Document Type and Number:
Japanese Patent JP3981246
Kind Code:
B2
Abstract:
A cleaning sheet for foreign-substance-disliking substrate processors such as apparatuses for manufacturing and inspecting semiconductors, flat panel displays, and print substrates, a cleaning-functional carrier member, and a cleaning method. The cleaning sheet is provided with a porous layer as the cleaning layer or an adhesive layer on one face of a sheet like material provided with a porous layer.
Inventors:
Ryo Namikawa
Yoshio Terada
Jiro Nukaga
Yoshio Terada
Jiro Nukaga
Application Number:
JP2001135466A
Publication Date:
September 26, 2007
Filing Date:
May 02, 2001
Export Citation:
Assignee:
NITTO DENKO CORPORATION
International Classes:
H01L21/304; B08B1/00; B08B1/02; C09J7/02; C09J201/00; H01L21/02; H01L21/027; H01L21/677; H01L21/68; H01L21/00
Domestic Patent References:
| JP2000312862A | ||||
| JP928645A | ||||
| JP291241A | ||||
| JP5326471A | ||||
| JP8181158A | ||||
| JP8323572A | ||||
| JP765362A |
Attorney, Agent or Firm:
祢▲ぎ▼元 邦夫