Title:
基板処理装置及び基板処理方法
Document Type and Number:
Japanese Patent JP4098908
Kind Code:
B2
Inventors:
Koji Nishi
Tadashi Sasaki
Tadashi Sasaki
Application Number:
JP2090899A
Publication Date:
June 11, 2008
Filing Date:
January 29, 1999
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
H01L21/027; G03F7/30; H01L21/304
Domestic Patent References:
| JP63022733U | ||||
| JP3124017A | ||||
| JP3259511A | ||||
| JP60138550A | ||||
| JP1067734U | ||||
| JP11165114A | ||||
| JP3207467A | ||||
| JP10223524A |
Attorney, Agent or Firm:
Inaoka cultivation
Mio Kawasaki
Mio Kawasaki