Title:
電子デバイスの製造方法
Document Type and Number:
Japanese Patent JP4181293
Kind Code:
B2
Inventors:
Toshihiko Nagai
Yuichi Miyu
Yuichi Miyu
Application Number:
JP2000345081A
Publication Date:
November 12, 2008
Filing Date:
November 13, 2000
Export Citation:
Assignee:
Matsushita Electric Industrial Co., Ltd
International Classes:
H01L21/302; H01L21/304; H01L21/3065; H01L21/308
Domestic Patent References:
| JP649641A | ||||
| JP88233A |
Attorney, Agent or Firm:
Hiroshi Maeda
Hiroshi Takeuchi
Takahisa Shimada
Yuji Takeuchi
Katsumi Imae
Atsushi Fujita
Kazunari Ninomiya
Tomoo Harada
Iseki Katsumori
Seki Kei
Yasuya Sugiura
Hiroshi Takeuchi
Takahisa Shimada
Yuji Takeuchi
Katsumi Imae
Atsushi Fujita
Kazunari Ninomiya
Tomoo Harada
Iseki Katsumori
Seki Kei
Yasuya Sugiura