Title:
半導体集積回路内電圧変動波形測定装置および電圧変動波形測定機能を有する半導体集積回路
Document Type and Number:
Japanese Patent JP4183551
Kind Code:
B2
Abstract:
An apparatus measures a voltage fluctuation waveform in a semiconductor integrated circuit having a large number of wiring layers and being operated on a lower voltage without a destructive inspection. For this purpose, the apparatus includes a power-source-system waveform converting circuit, disposed close to a functional circuit and in the LSI and operated on a second rated voltage higher than a first rated voltage, for converting the voltage fluctuation waveform of the power source system into an electrical current waveform; a pad for outputting the electric current waveform outside the LSI; and a wiring, arranged in the LSI, for connecting the power-source-system waveform converting circuit and the pad. The apparatus is used to measure a voltage fluctuation waveform near a particular circuit in operation included in, for example, a CMOS LSI.
Inventors:
Keisuke Muratani
Yuki Ozeki
Yuki Ozeki
Application Number:
JP2003123654A
Publication Date:
November 19, 2008
Filing Date:
April 28, 2003
Export Citation:
Assignee:
富士通株式会社
International Classes:
G01R31/28; G01R19/165; G01R31/02; H01L21/66; H01L21/82; H02M3/335
Domestic Patent References:
| JP2001289914A | ||||
| JP4022000A | ||||
| JP1189572A |
Attorney, Agent or Firm:
Yu Sanada
Previous Patent: メモリコントローラ及びメモリコントローラを備えるフラッシュメモリシ...
Next Patent: PITCH CONVERSION DEVICE AND PITCH/INCLINATION CONVERSION DEVICE
Next Patent: PITCH CONVERSION DEVICE AND PITCH/INCLINATION CONVERSION DEVICE