Title:
研磨装置
Document Type and Number:
Japanese Patent JP4230183
Kind Code:
B2
Inventors:
Takatoshi Takemoto
Kawamata Isamu
Kawamata Isamu
Application Number:
JP2002247880A
Publication Date:
February 25, 2009
Filing Date:
August 27, 2002
Export Citation:
Assignee:
Ace Denken Co., Ltd.
International Classes:
A63F7/02
Domestic Patent References:
| JP11226230A | ||||
| JP8294569A | ||||
| JP10179913A | ||||
| JP9262363A | ||||
| JP2000167220A |
Attorney, Agent or Firm:
Kenji Kashihara