Title:
光偏向器
Document Type and Number:
Japanese Patent JP4262574
Kind Code:
B2
Abstract:
A light deflector comprises a first movable plate (122) having a reflective surface (132), fixing portions (130a and 130b), a pair of second movable plates (126a and 126b) located between the first movable plate (122) and the fixing portions (130a and 130b), a pair of first elastic members (124a and 124b) supporting the first movable plate (122) so as to allow it to oscillate with respect to the second movable plates (126a and 126b), a pair of second elastic members (128a and 128b) supporting the second movable plates (126a and 126b) so as to allow them to oscillate with respect to the fixing portions (130a and 130b), and an actuator to oscillate the first movable plate (122). Oscillation axis of the first elastic members (124a and 124b) and oscillation axis of the second elastic members (128a and 128b) are located on the same axis. Stiffness of the second elastic members (128a and 128b) against oscillation is lower than stiffness of the first elastic members (124a and 124b) against oscillation.
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Inventors:
Kenji Murakami
Yoshitaka Kamiya
Hiroshi Miyajima
Arai Yuji
Yoshitaka Kamiya
Hiroshi Miyajima
Arai Yuji
Application Number:
JP2003370900A
Publication Date:
May 13, 2009
Filing Date:
October 30, 2003
Export Citation:
Assignee:
Olympus Endo Technology America Inc.
International Classes:
G02B26/10; B81B3/00
Domestic Patent References:
| JP6175060A | ||||
| JP6269186A | ||||
| JP2001091889A | ||||
| JP2000162538A | ||||
| JP6180428A | ||||
| JP7092409A | ||||
| JP2006525548A | ||||
| JP2005099760A | ||||
| JP2004226548A |
Attorney, Agent or Firm:
Takehiko Suzue
Satoshi Kono
Sadao Muramatsu
Tetsuya Kazama
Satoshi Kono
Sadao Muramatsu
Tetsuya Kazama