Title:
ウェハのアライナー装置
Document Type and Number:
Japanese Patent JP4277092
Kind Code:
B2
Inventors:
Naofumi Kirihata
Application Number:
JP2003092134A
Publication Date:
June 10, 2009
Filing Date:
March 28, 2003
Export Citation:
Assignee:
Assist Technologies Japan Holdings, Inc.
International Classes:
H01L21/68; H01L21/683
Domestic Patent References:
| JP2000021956A | ||||
| JP2002359277A | ||||
| JP62069631A | ||||
| JP63072138A | ||||
| JP2002151577A | ||||
| JP2002043393A |
Attorney, Agent or Firm:
Sadao Kumakura
Fumiaki Otsuka
Shishido Kaichi
Village shrine Atsuo
Disciple Maru Ken
Ino Sato
Toru Watanabe
Fumiaki Otsuka
Shishido Kaichi
Village shrine Atsuo
Disciple Maru Ken
Ino Sato
Toru Watanabe