Title:
局所ドライエッチング方法
Document Type and Number:
Japanese Patent JP4368615
Kind Code:
B2
Inventors:
Michihiko Yanagisawa
Tanaka Oath
Tanaka Oath
Application Number:
JP2003146960A
Publication Date:
November 18, 2009
Filing Date:
May 23, 2003
Export Citation:
Assignee:
Speed Fam Co., Ltd.
International Classes:
H01L21/3065
Domestic Patent References:
| JP8111406A | ||||
| JP8279494A | ||||
| JP7221024A |
Attorney, Agent or Firm:
Masakage Amano
Kazuo Sadashige
Kazuo Sadashige