Title:
放出ガス測定装置及び測定方法
Document Type and Number:
Japanese Patent JP4444390
Kind Code:
B2
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Inventors:
Kazuya Saito
Yasuhiro Hara
Yoichi Hoshino
Inayoshi Sakae
Yasuhiro Hara
Yoichi Hoshino
Inayoshi Sakae
Application Number:
JP10976499A
Publication Date:
March 31, 2010
Filing Date:
April 16, 1999
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
G01N27/62; G01N1/28; H01L21/66
Domestic Patent References:
| JP5315421A | ||||
| JP10153579A |
Attorney, Agent or Firm:
Yoshihiro Shimizu