Title:
加工物にパターン形成するための方法及び装置、並びにその製造方法
Document Type and Number:
Japanese Patent JP4464971
Kind Code:
B2
Abstract:
An apparatus for patterning a work piece including a source, and at least one reflective tilting surface adapted to induce a phase difference using at least one of a phase shifting plate and a difference in step height. A method corresponding to the apparatus for patterning a work piece. A method of manufacturing the apparatus for patterning a work piece and a Spatial Light Modulator, which may be included therein.
Inventors:
Lung Blood, Ulric
Application Number:
JP2006543778A
Publication Date:
May 19, 2010
Filing Date:
December 10, 2004
Export Citation:
Assignee:
Micronic Laser Systems Activora Get
International Classes:
G02B26/08; B81B3/00; B81C1/00; G02B5/18; G02B26/00; G03F7/20; H01L21/027
Domestic Patent References:
| JP6102459A | ||||
| JP6281869A | ||||
| JP2000231012A | ||||
| JP5019447A | ||||
| JP2003322807A | ||||
| JP8084484A | ||||
| JP2001180038A | ||||
| JP2005116609A |
Attorney, Agent or Firm:
Hideto Asamura
Hajime Asamura
Toru Mori
Yutaka Yoshida
Hajime Asamura
Toru Mori
Yutaka Yoshida