Title:
単結晶の製造方法
Document Type and Number:
Japanese Patent JP4569103
Kind Code:
B2
Inventors:
Masaru Sonokawa
Naoki Nagai
Fusegawa Izumi
Naoki Nagai
Fusegawa Izumi
Application Number:
JP2003428839A
Publication Date:
October 27, 2010
Filing Date:
December 25, 2003
Export Citation:
Assignee:
Shin-Etsu Semiconductor Co., Ltd.
International Classes:
C30B15/20; C30B29/06
Domestic Patent References:
| JP6183876A | ||||
| JP2000178099A | ||||
| JP2001342097A | ||||
| JP2000313691A | ||||
| JP9221379A |
Attorney, Agent or Firm:
Mikio Yoshimiya