Title:
超薄膜および薄膜計測方法
Document Type and Number:
Japanese Patent JP4587690
Kind Code:
B2
More Like This:
Inventors:
Nabat Bergabain, Natalia
Yoko Waza
Yoko Waza
Application Number:
JP2004096884A
Publication Date:
November 24, 2010
Filing Date:
March 29, 2004
Export Citation:
Assignee:
HORIBA, Ltd.
International Classes:
G01B11/06; G01N21/21; G01J4/04; G01N21/27
Domestic Patent References:
| JP8264614A | ||||
| JP2001183505A |
Other References:
J.A.Woollam, 他,“Overview of Variable Angle Spectroscopic Ellipsometry (VASE), Part I: Basic Theory and Typical Applications”,Proceedings of SPIE,1999年 7月,Vol.CR72,pp.3-28
B.S.Stutzman, 他,“Two-channel spectroscopic reflectometry for in situ monitoring of blanket and patterned structures during reactive ion etching”,Journal of Vacuum Science and Technology B,2000年11月,Vol.18, Issue 6,pp.2785-2793
S.Bosch, 他,“Effective dielectric function of mixtures of three or more materials: a numerical procedure for computations”,Surface Science,2000年 5月10日,Vol.453, Issues 1-3,pp.9-17
J.F.Elman 他3名,“Characterization of biaxially-stretched plastic films by generalized ellipsometry”,Thin Solid Films,1998年 2月13日,Vols.313-314,pp.814-818
B.S.Stutzman, 他,“Two-channel spectroscopic reflectometry for in situ monitoring of blanket and patterned structures during reactive ion etching”,Journal of Vacuum Science and Technology B,2000年11月,Vol.18, Issue 6,pp.2785-2793
S.Bosch, 他,“Effective dielectric function of mixtures of three or more materials: a numerical procedure for computations”,Surface Science,2000年 5月10日,Vol.453, Issues 1-3,pp.9-17
J.F.Elman 他3名,“Characterization of biaxially-stretched plastic films by generalized ellipsometry”,Thin Solid Films,1998年 2月13日,Vols.313-314,pp.814-818
Attorney, Agent or Firm:
Nobuo Kono
Hideno Kono
Hideno Kono