Title:
レーザCVD装置
Document Type and Number:
Japanese Patent JP4596118
Kind Code:
B2
Inventors:
Naoji Nada
Hideo Kawabe
Yuichi Aki
Yoshihisa Miura
Hideo Kawabe
Yuichi Aki
Yoshihisa Miura
Application Number:
JP2003408540A
Publication Date:
December 08, 2010
Filing Date:
December 08, 2003
Export Citation:
Assignee:
ソニー株式会社
International Classes:
C23C16/48; H01L21/285; H01L21/3205; H01L23/52
Domestic Patent References:
| JP2001023982A | ||||
| JP1502149A | ||||
| JP8222565A | ||||
| JP10324973A | ||||
| JP2001242300A | ||||
| JP2000306848A | ||||
| JP10280152A |
Attorney, Agent or Firm:
Yoichiro Fujishima