Title:
強誘電体膜の製造方法
Document Type and Number:
Japanese Patent JP4596117
Kind Code:
B2
Abstract:
To provide a method for manufacturing a ferroelectric substance membrane having sufficient crystal quality, and a ferroelectric substance membrane obtained by the manufacturing method.
The method for manufacturing the ferroelectric substance membrane includes a step for charging a particle of the ferroelectric substance material; a step for electrodepositing the charged particle on a first electrode 40 by a migration electrodeposition process to form the ferroelectric substance material membrane 50; and a step for heating/treating the ferroelectric substance material membrane 50.
COPYRIGHT: (C)2005,JPO&NCIPI
Inventors:
Ken Kijima
Application Number:
JP2003274073A
Publication Date:
December 08, 2010
Filing Date:
July 14, 2003
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
C04B35/628; H01L21/8246; B01J19/08; B28B1/00; H01L27/105
Domestic Patent References:
| JP58018916A | ||||
| JP2002275390A | ||||
| JP63110681A | ||||
| JP2000203942A | ||||
| JP6047273A | ||||
| JP54022168A | ||||
| JP4278123A |
Attorney, Agent or Firm:
Yukio Fuse
Mitsue Obuchi
Mitsue Obuchi