Title:
ディスク搬送機構、これを利用したディスク検査装置およびディスク検査方法
Document Type and Number:
Japanese Patent JP4642714
Kind Code:
B2
More Like This:
Inventors:
Tsutomu Nakadai
Application Number:
JP2006203116A
Publication Date:
March 02, 2011
Filing Date:
July 26, 2006
Export Citation:
Assignee:
Hitachi High-Technologies Corporation
International Classes:
G01N21/84; G01N21/95; G11B5/84
Domestic Patent References:
| JP2006260675A | ||||
| JP9186207A | ||||
| JP6118015A |
Attorney, Agent or Firm:
Kajiyama Hiroshi
Fujio Yamamoto
Fujio Yamamoto