Title:
検査方法および装置、リソグラフィ装置、リソグラフィ処理セルならびにデバイス製造方法
Document Type and Number:
Japanese Patent JP4648930
Kind Code:
B2
Abstract:
A method is provided for determining an actual profile of an object printed on a substrate. The method can include receiving an actual spectrum signal associated with the object, selecting a first model profile, and generating a first model spectrum signal associated with the first model profile. The method can further include comparing the first model spectrum signal with the actual spectrum signal. If the first model spectrum signal and the actual spectrum signal do not match a desired tolerance, the aforementioned selecting, generating, and comparing can be repeated with a second model profile. The second model profile can be selected based on the first model spectrum signal having undergone an optimization process based on a number of variable parameters of the first model profile, where the number of variable parameters is reduced by approximating the first model profile to a single shape with a reduced number of variable parameters.
More Like This:
Inventors:
Keels, antoine, gaston, marie
Naumoski, Gosse
Naumoski, Gosse
Application Number:
JP2007232145A
Publication Date:
March 09, 2011
Filing Date:
September 07, 2007
Export Citation:
Assignee:
AS M Netherlands B.V.
International Classes:
G01B11/24; H01L21/027
Domestic Patent References:
| JP2004536314A |
Foreign References:
| US5963329 |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Shinji Oga
Toshifumi Onuki
Shinji Oga
Toshifumi Onuki