Title:
保護膜除去装置、薬液の回収方法及び記憶媒体
Document Type and Number:
Japanese Patent JP4692341
Kind Code:
B2
Abstract:
The present invention improves recover percentage at which a mixed chemical solution discharged from a protective film removing device. The protective film removing device includes: a recovery line communicating with an atmosphere surrounding a substrate to recover a mixed chemical solution, an intermediate tank connected to the outlet end of the recovery line, a volatilization preventing liquid supply means for supplying a volatilization preventing liquid having a specific gravity smaller than that of the mixed chemical solution into the intermediate tank in advance, a transfer line having an inlet end connected to the intermediate tank and provided with a valve, a recovery tank connected to an outlet end of the transfer line, a liquid quantity monitoring means for monitoring a quantity of a liquid contained in the intermediate tank, and a control means for opening the valve of the transfer line to transfer the liquid contained in the intermediate tank to the recovery tank when it is decided that the quantity of the liquid contained in the intermediate tank reached a predetermined quantity on the basis of a signal provided by the liquid quantity monitoring means.
Inventors:
Taro Yamamoto
Kosuke Yoshihara
Kosuke Yoshihara
Application Number:
JP2006069664A
Publication Date:
June 01, 2011
Filing Date:
March 14, 2006
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/027; G03F7/38; H01L21/304
Domestic Patent References:
| JP2005183709A | ||||
| JP8173921A | ||||
| JP7037850A | ||||
| JP2004053923A |
Foreign References:
| WO2007029767A1 |
Attorney, Agent or Firm:
Toshio Inoue