Title:
半導体装置
Document Type and Number:
Japanese Patent JP4701034
Kind Code:
B2
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Inventors:
Takeo Masato
Application Number:
JP2005223987A
Publication Date:
June 15, 2011
Filing Date:
August 02, 2005
Export Citation:
Assignee:
Panasonic Corporation
International Classes:
H01L21/82
Domestic Patent References:
JP61230336A | ||||
JP4192459A | ||||
JP7153610A | ||||
JP9017878A | ||||
JP11506874A |
Attorney, Agent or Firm:
Hiroshi Maeda
Hiroshi Koyama
Hiroshi Takeuchi
Takahisa Shimada
Yuji Takeuchi
Katsumi Imae
Atsushi Fujita
Kazunari Ninomiya
Tomoo Harada
Iseki Katsumori
Seki Kei
Yasuya Sugiura
Hiroshi Koyama
Hiroshi Takeuchi
Takahisa Shimada
Yuji Takeuchi
Katsumi Imae
Atsushi Fujita
Kazunari Ninomiya
Tomoo Harada
Iseki Katsumori
Seki Kei
Yasuya Sugiura