Title:
感光性樹脂組成物の使用
Document Type and Number:
Japanese Patent JP4706188
Kind Code:
B2
Inventors:
Tetsuya Yoshida
Naoki Sasahara
Katsunori Tsuchiya
Akio Nakano
Naoki Sasahara
Katsunori Tsuchiya
Akio Nakano
Application Number:
JP2004142849A
Publication Date:
June 22, 2011
Filing Date:
May 12, 2004
Export Citation:
Assignee:
Hitachi Chemical Co., Ltd.
International Classes:
G03F7/004; G03F7/32; G03F7/40; H05K3/28
Domestic Patent References:
| JP2000095837A | ||||
| JP2000208904A | ||||
| JP2000236160A | ||||
| JP9311458A | ||||
| JP7036196A | ||||
| JP6080760A | ||||
| JP2000241969A |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Shiro Terasaki
Yoshinori Shimizu
Shiro Terasaki
Yoshinori Shimizu