Title:
表面検査方法および装置
Document Type and Number:
Japanese Patent JP4756785
Kind Code:
B2
Inventors:
Akira Isobe
Shinichiro Kakita
Kazumi Haga
Shinichiro Kakita
Kazumi Haga
Application Number:
JP2001223206A
Publication Date:
August 24, 2011
Filing Date:
July 24, 2001
Export Citation:
Assignee:
Renesas Electronics Corporation
Nano System Solutions Co., Ltd.
Nano System Solutions Co., Ltd.
International Classes:
G01B11/24; G01N21/956; H01L21/66
Domestic Patent References:
| JP10307011A | ||||
| JP7325036A | ||||
| JP2001255139A | ||||
| JP2001091228A | ||||
| JP2001194122A |
Attorney, Agent or Firm:
Yoshio Arafune
Hiroshi Arafune
Hiroshi Arafune