Title:
スパッタリングターゲットの製造方法
Document Type and Number:
Japanese Patent JP5038553
Kind Code:
B2
Inventors:
Takashi Watanabe
Takashi Ishigami
Yasuo Takasaka
Naomi Fujioka
Yukinobu Suzuki
Takashi Ishigami
Yasuo Takasaka
Naomi Fujioka
Yukinobu Suzuki
Application Number:
JP2000128359A
Publication Date:
October 03, 2012
Filing Date:
April 27, 2000
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
C23C14/34; C22C28/00; H01L21/203; H01L21/28; H01L21/285
Domestic Patent References:
| JP10110265A | ||||
| JP849068A | ||||
| JP3130360A | ||||
| JP11256322A |
Attorney, Agent or Firm:
Patent Business Corporation Sakura International Patent Office