Title:
キャパシタ構造を有するイメージセンサ及びその製造方法
Document Type and Number:
Japanese Patent JP5038554
Kind Code:
B2
Abstract:
An image sensor includes a plurality of unit pixels for sensing a light beam to generate an image data. Each of the unit pixels includes, a photoelectric element for sensing a light beam incident thereto and generating photoelectric charges, a transistor including a gate dielectric formed adjacent to the photoelectric element and a gate electrode formed on top of the gate dielectric and a capacitor structure including an insulating film formed on a portion of the photoelectric element and a bottom electrode, wherein the insulating film and the gate dielectric are made of a same material and the bottom electrode and the gate electrode are made of a same material.
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Inventors:
Han Jin Soo
Kure Kaoru Sho
Kure Kaoru Sho
Application Number:
JP2000400704A
Publication Date:
October 03, 2012
Filing Date:
December 28, 2000
Export Citation:
Assignee:
Intellectual Ventures ii Limited Liability Company
International Classes:
H01L27/146; H01L21/8234; H01L27/06; H01L31/10
Domestic Patent References:
| JP11238881A | ||||
| JP5090556A | ||||
| JP5161079A | ||||
| JP9186309A | ||||
| JP5013739A |
Attorney, Agent or Firm:
Shoichi Okuyama
Arihara Koichi
Matsushima Tetsuo
Hidefumi Kawamura
Ayako Nakamura
Satoshi Morimoto
Kyoko Tsunoda
Yu Tanaka
Tokumoto Koichi
Atsushi Watanabe
Naomi Yoshida
Fukagawa Eri
Arihara Koichi
Matsushima Tetsuo
Hidefumi Kawamura
Ayako Nakamura
Satoshi Morimoto
Kyoko Tsunoda
Yu Tanaka
Tokumoto Koichi
Atsushi Watanabe
Naomi Yoshida
Fukagawa Eri