Title:
多重粒子ビームを基板に結像するための装置及び方法
Document Type and Number:
Japanese Patent JP5089034
Kind Code:
B2
Abstract:
A device and a method for imaging and positioning a multiparticle beam on a substrate is disclosed. The device comprises a particle beam source with a condenser optic that produces a particle beam that illuminates the surface of an aperture plate. A multiplicity of individual beams are produced from the particle beam by means of the aperture plate, which are then projected by a projection system onto a substrate where they describe a beam base point. The substrate or target, respectively, is placed on a table that is movable along an x-coordinate and a y-coordinate, and that is provided with a laser path measurement system. The laser path measurement system relays positional data with a fixed clock rate to a synchronization and control device 50 that positions the beam base point along the x-coordinate and the y-coordinate via a beam tracking system, taking into account the corrective data and pixel phase, whereby precise staircase beam-to-table positioning is achieved across the entire substrate in spite of faulty table movement.
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Inventors:
Joachim Heinitz
Andreas Schubert
Andreas Schubert
Application Number:
JP2005331373A
Publication Date:
December 05, 2012
Filing Date:
November 16, 2005
Export Citation:
Assignee:
Vistec Electron Beam Game Beamer
International Classes:
H01L21/027
Domestic Patent References:
| JP2004040076A | ||||
| JP8107059A | ||||
| JP7312338A | ||||
| JP3174715A |
Attorney, Agent or Firm:
Kato Asamichi
Kiuchi Uchida
Toshio Miyake
Kiuchi Uchida
Toshio Miyake