Title:
圧力ベース流れ制御装置用の詰まりのない流れ絞り部
Document Type and Number:
Japanese Patent JP5118750
Kind Code:
B2
Abstract:
A flow metering device includes at least two stackable modular bodies including at least one set of adjacent modular bodies, each modular body having an orifice for modulating fluid flow therethrough. The modular bodies arranged such that the orifices between adjacent modular bodies are offset from each other. Adjacent stacked modular bodies define a chamber for trapping particulates entrained in fluid flow without obstructing fluid flow through the orifices.
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Inventors:
Lowry, Patrick A.
Application Number:
JP2010527136A
Publication Date:
January 16, 2013
Filing Date:
September 25, 2008
Export Citation:
Assignee:
Sir Core Instrumentation Technologies, Inc.
International Classes:
G01F1/42
Domestic Patent References:
JP54142835U | ||||
JP8219832A | ||||
JP63009797A | ||||
JP5322624A | ||||
JP10078337A |
Attorney, Agent or Firm:
Shinjiro Ono
Kazuo Shamoto
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Yasuaki Omiyama
Kazuo Shamoto
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Yasuaki Omiyama
Previous Patent: JPS5118749
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