Title:
パワー半導体装置、その製造方法及びその疲労特性監視方法
Document Type and Number:
Japanese Patent JP5206171
Kind Code:
B2
Inventors:
Katsuhiko Yanagawa
Yoshinari Ikeda
Yoshinari Ikeda
Application Number:
JP2008176659A
Publication Date:
June 12, 2013
Filing Date:
July 07, 2008
Export Citation:
Assignee:
Fuji Electric Co., Ltd.
International Classes:
H01L25/07; H01L25/18
Domestic Patent References:
| JP9172116A | ||||
| JP2269901A | ||||
| JP2009194270A | ||||
| JP2002343937A | ||||
| JP2008531137A | ||||
| JP200282084A |
Attorney, Agent or Firm:
Takeshi Hattori