Title:
画像プローブの校正方法および形状測定機
Document Type and Number:
Japanese Patent JP5297906
Kind Code:
B2
Inventors:
Masanori Arai
Application Number:
JP2009144956A
Publication Date:
September 25, 2013
Filing Date:
June 18, 2009
Export Citation:
Assignee:
Mitutoyo Corporation
International Classes:
G01B11/00; G01B5/00; G01B5/008
Domestic Patent References:
| JP2001165630A | ||||
| JP7146130A | ||||
| JP2007078635A | ||||
| JP9329402A |
Attorney, Agent or Firm:
Intellectual Property Office