Title:
光検出装置
Document Type and Number:
Japanese Patent JP5297907
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a light detection device capable of increasing the output of each of photodiodes without increasing an applied voltage.SOLUTION: A first reflector E2 is formed on the surface of a semiconductor substrate 1N and a first reflector E2 is formed on a dead space having no light detection function. An incident light is reflected, reflected again on the second reflector, and made incident into each photodiode again. In this way, the final incident amount to the photodiodes can be increased, so that the output from each photodiode can be increased. Although a signal reading wiring TL also works as a reflector because it is generally made of metal, the active first reflector E2 is provided in addition to such an inactive reflector.
Inventors:
Kazuhisa Yamamura
Kenichi Sato
Kenichi Sato
Application Number:
JP2009145727A
Publication Date:
September 25, 2013
Filing Date:
June 18, 2009
Export Citation:
Assignee:
Hamamatsu Photonics Co., Ltd.
International Classes:
H01L31/10
Domestic Patent References:
| JP2005165254A |
Foreign References:
| WO2008004547A1 | ||||
| WO2007100538A2 |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Shiro Terasaki
Satoru Ishida
Shiro Terasaki
Satoru Ishida