Title:
機械電気変換素子、機械電気変換装置及びその製造方法
Document Type and Number:
Japanese Patent JP5305304
Kind Code:
B2
Abstract:
An electro-mechanical transducer contains a vibrating electrode (15b), a vibrating-electrode-insulating film (15a) disposed at a bottom surface of the vibrating electrode (15b), an electret layer (13) facing to the vibrating electrode (15b), an electret-insulating layer (14e) joined to a top surface of the electret layer (13), and a back electrode 17 in contact with a bottom surface of the electret layer (13). A microgap between ten nanometers and 100 micrometers is established between the vibrating-electrode-insulating film (15a) and electret-insulating layer (14e). A central line average roughness Ra of the vibrating electrode (15b), including a bending, is 1/10 or less of a gap width measured between the bottom surface of the vibrating electrode (15b) and the top surface of the electret layer (13).
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Inventors:
Kensuke Kageyama
Application Number:
JP2010507250A
Publication Date:
October 02, 2013
Filing Date:
April 07, 2009
Export Citation:
Assignee:
Saitama University
International Classes:
H04R19/01; H04R31/00
Domestic Patent References:
| JPS4326262B1 | ||||
| JP2002534933A | 2002-10-15 | |||
| JP2007298297A | 2007-11-15 | |||
| JPH04336799A | 1992-11-24 | |||
| JPS4326262B1 |
Attorney, Agent or Firm:
Hidekazu Miyoshi
Suzuki Isobe
Suzuki Isobe