Title:
フォトレジスト除去装置
Document Type and Number:
Japanese Patent JP5336894
Kind Code:
B2
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Inventors:
Makoto Hotta
Yukinori Yanagi
Yukinori Yanagi
Application Number:
JP2009068818A
Publication Date:
November 06, 2013
Filing Date:
March 19, 2009
Export Citation:
Assignee:
Nomura Micro Science Co., Ltd.
International Classes:
H01L21/027
Domestic Patent References:
| JP2007201070A | ||||
| JP2003037095A | ||||
| JP2008311256A | ||||
| JP2008130763A | ||||
| JP2002025971A | ||||
| JP2005093694A | ||||
| JP2007273598A |
Attorney, Agent or Firm:
Saichi Suyama
Yukio Kawahara
Satoshi Yamashita
Hideaki Suyama
Yukio Kawahara
Satoshi Yamashita
Hideaki Suyama