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Title:
接着フィルム、接着シート、半導体装置及び半導体装置の製造方法
Document Type and Number:
Japanese Patent JP5374972
Kind Code:
B2
Abstract:

To provide an adhesive film and an adhesive sheet which can be adhered, for example, to a member such as a semiconductor wafer at low temperature, easily peeled off, for example, from a member such as a dicing sheet, and air bubbles are hard to be generated between the adhesive film and a support member, for example, when the adhesive film is adhered to the support member, to provide a semiconductor device using the same, and to provide a method for manufacturing the semiconductor device.

The adhesive film has a high tack side A and a low tack side B. When tack strength of the high tack side A at 40°C is denoted by FA, and tack strength of the low tack side B at 40°C is denoted by FB, relations of FA/FB≥5 and FA≥10gf are satisfied. The high tack side A contains a first adhesive resin compound, and the low tack side B contains a second adhesive resin compound different from the first adhesive resin compound. Storage elasticity of a hardened material of the second adhesive resin compound at 260°C is 0.1-2.0 MPa.

COPYRIGHT: (C)2010,JPO&INPIT


Inventors:
Keiichi Hatakeyama
Yoshinobu Ozaki
Takashi Masuko
Nakamura Yuki
Masanobu Miyahara
Application Number:
JP2008223869A
Publication Date:
December 25, 2013
Filing Date:
September 01, 2008
Export Citation:
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Assignee:
Hitachi Chemical Co., Ltd.
International Classes:
H01L21/52; C09J7/02; H01L21/301
Domestic Patent References:
JP2004247657A
JP2001152123A
JP2005260204A
JP2007270125A
JP2004165687A
JP2004266137A
JP6172716A
JP2005235795A
JP2005019516A
JP2008056820A
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshinori Shimizu
Tosuke Yosuke