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Title:
加工物の光学的表面特性の測定装置
Document Type and Number:
Japanese Patent JP5469349
Kind Code:
B2
Abstract:
The invention relates to an apparatus for determining optical surface properties of workpieces, comprising a housing, in the interior of which there is provided a carrier on which the workpiece be arranged, and comprising a radiation device which directs radiation onto the workpiece in a predefined emission direction (E). According to the invention, the housing has in at least one wall an observation opening, through which a region of the workpiece illuminated by the radiation device can be observed in a predefined observation direction (B).

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Inventors:
Conrad Rex
Application Number:
JP2009054746A
Publication Date:
April 16, 2014
Filing Date:
March 09, 2009
Export Citation:
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Assignee:
Beyup Sironker-Gardnell Gaem Behr
International Classes:
G01N21/47; G01N21/84
Domestic Patent References:
JP50144483A
JP51076437U
JP3011477U
JP2035339A
JP58156822A
JP62188325A
JP2006030204A
JP61079132A
JP5008448U
JP4110960U
Foreign References:
US3519360
Attorney, Agent or Firm:
Kenji Yoshida
Jun Ishida



 
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