Title:
非接触膜厚測定装置
Document Type and Number:
Japanese Patent JP5472675
Kind Code:
B2
Abstract:
A non-contacting type paint film thickness measuring device includes a paint film thickness measuring unit (17) having a terahertz pulse light generating portion (1) for generating a terahertz pulse light, a first optical system (5) for collimating and focusing an incident terahertz pulse light that is the terahertz pulse light generated by the terahertz pulse light generating portion (1) to an object (20) whose paint film thickness is measured, a second optical system (6) for receiving a terahertz echo pulse that is the incident terahertz pulse light collimated and focused to the object (20) in the first optical system (5) and reflected at the object (20), a pulse width shortening portion (15) for shortening a pulse width of the terahertz echo pulse, and a detecting portion (7) for detecting electric field amplitude-time resolved waveform of the terahertz echo pulse whose pulse width is shortened by the pulse width shortening portion (15).
Inventors:
Hideyuki Otake
Application Number:
JP2009022464A
Publication Date:
April 16, 2014
Filing Date:
February 03, 2009
Export Citation:
Assignee:
Aisin Seiki Co., Ltd.
International Classes:
G01B11/06; G01N21/35; G01N21/3586
Domestic Patent References:
| JP7091921A | ||||
| JP2004028618A | ||||
| JP2008286584A | ||||
| JP2002170799A | ||||
| JP2003295104A | ||||
| JP2010038809A |
Foreign References:
| US20090314944 | ||||
| WO2008147575A2 |
Other References:
大谷 知行(外3名),解説 テラヘルツイメージングの安心・安全分野への応用,応用物理,日本,社団法人応用物理学会,2006年 2月10日,第75巻,第2号,pp. 188-195
Attorney, Agent or Firm:
Hiroshi Okawa