Title:
照明光学系、露光装置及びデバイス製造方法
Document Type and Number:
Japanese Patent JP5806479
Kind Code:
B2
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Inventors:
Osaka Noboru
Application Number:
JP2011036334A
Publication Date:
November 10, 2015
Filing Date:
February 22, 2011
Export Citation:
Assignee:
Canon Inc
International Classes:
G03F7/20
Domestic Patent References:
| JP2000164487A | ||||
| JP7263312A | ||||
| JP11354424A | ||||
| JP3171614A | ||||
| JP2001242326A | ||||
| JP2007041378A | ||||
| JP2001033875A | ||||
| JP2004022708A | ||||
| JP4225514A | ||||
| JP2002184676A |
Attorney, Agent or Firm:
Yasunori Otsuka
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu