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Title:
多結晶性モノリシックアルミン酸マグネシウムスピネル
Document Type and Number:
Japanese Patent JP5813851
Kind Code:
B2
Abstract:
Polycrystalline monolithic magnesium aluminate spinels are disclosed. The polycrystalline monolithic magnesium aluminate spinels have small grain sizes and may be deposited on substrates as thick one-piece deposits. The polycrystalline monolithic magnesium aluminate spinels may be prepared and deposited by chemical vapor deposition. Articles made with the polycrystalline monolithic magnesium aluminate spinels also are disclosed.

Inventors:
Gitendra Es Goela
Heather A. G. Stern
Application Number:
JP2014234365A
Publication Date:
November 17, 2015
Filing Date:
November 19, 2014
Export Citation:
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Assignee:
Rohm and Haas Electronic Materials LLC
International Classes:
C01F7/16
Domestic Patent References:
JP11258201A
JP2001240482A
Foreign References:
US20050145968
US20050164867
Attorney, Agent or Firm:
Patent Business Corporation Sender International Patent Office