バラクタダイオードおよび半導体集積回路

Title:

バラクタダイオードおよび半導体集積回路

Document Type and Number:

Japanese Patent JP5878739

Kind Code:

B2

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Inventors:

Hiroshi Matsuoka
Taisuke Matsumoto
Yukio Okubo

Application Number:

JP2011254960A

Publication Date:

March 08, 2016

Filing Date:

November 22, 2011

Export Citation:

Assignee:

Anritsu Co., Ltd.

International Classes:

H01L21/329; H01L21/331; H01L21/8222; H01L27/06; H01L29/737; H01L29/93

Domestic Patent References:

Attorney, Agent or Firm:

Seishi Hayakawa

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