Title:
アルミニウム合金膜
Document Type and Number:
Japanese Patent JP5890256
Kind Code:
B2
Inventors:
Hiroyuki Sugawara
Application Number:
JP2012128537A
Publication Date:
March 22, 2016
Filing Date:
June 06, 2012
Export Citation:
Assignee:
Geomatec Co., Ltd.
International Classes:
C23C14/14; C22C21/00; C23C14/34; H01L21/28; H01L21/285
Domestic Patent References:
| JP5266519A | ||||
| JP2003073810A | ||||
| JP2001118286A | ||||
| JP52090430A | ||||
| JP2011021275A | ||||
| JP3016132A |
Attorney, Agent or Firm:
Tomohiro Sakamoto