Title:
計測装置、ステージ装置、露光装置および物品の製造方法
Document Type and Number:
Japanese Patent JP6313552
Kind Code:
B2
Inventors:
Shinichiro Hirai
Kazuhiko Mishima
Ryo Takai
Hama Zenichi Tani
Kazuhiko Mishima
Ryo Takai
Hama Zenichi Tani
Application Number:
JP2013150984A
Publication Date:
April 18, 2018
Filing Date:
July 19, 2013
Export Citation:
Assignee:
Canon Inc
International Classes:
G01B11/00; G01B11/26; H01L21/027
Domestic Patent References:
| JP10242248A | ||||
| JP2009036766A | ||||
| JP2010118524A | ||||
| JP2000039305A |
Foreign References:
| US20090323078 |
Attorney, Agent or Firm:
Yasunori Otsuka
Yasuhiro Otsuka
Shiro Takayanagi
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu
Yasuhiro Otsuka
Shiro Takayanagi
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu