Title:
単結晶製造装置および製造方法
Document Type and Number:
Japanese Patent JP6551135
Kind Code:
B2
Inventors:
Toshio Hayashida
Application Number:
JP2015202972A
Publication Date:
July 31, 2019
Filing Date:
October 14, 2015
Export Citation:
Assignee:
Sumco inc.
International Classes:
C30B15/20; C30B29/06
Domestic Patent References:
| JP2002539060A | ||||
| JP6064993A | ||||
| JP2011037680A | ||||
| JP2011057545A |
Attorney, Agent or Firm:
Mitsuhiro Washito
Ogata Japanese
Ogata Japanese