Title:
ＣＭＰ用研磨液及び研磨方法
Document Type and Number:
Japanese Patent JP6551136
Kind Code:
B2
Inventors:
Takaaki Tanaka
Keita Arakawa
Nao Yamamura
Yoshikawa Shigeru
Takashi Shinoda
Keita Arakawa
Nao Yamamura
Yoshikawa Shigeru
Takashi Shinoda
Application Number:
JP2015203066A
Publication Date:
July 31, 2019
Filing Date:
October 14, 2015
Export Citation:
Assignee:
Hitachi Chemical Co., Ltd.
International Classes:
H01L21/304; B24B37/00; C09K3/14
Domestic Patent References:
| JP2013140984A | ||||
| JP2006173411A | ||||
| JP2010016064A | ||||
| JP2015129217A | ||||
| JP2008503874A | ||||
| JP2012146974A |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshinori Shimizu
Hiroyuki Hirano
Tomoya Furoshita
Yoshinori Shimizu
Hiroyuki Hirano
Tomoya Furoshita